This 190-m2 class-100,000 cleanroom laboratory is dedicated to the fabrication and characterisation of perovskite solar cells, including advanced device integration such as perovskite mini-modules and perovskite-based tandem solar cells and mini-modules.
Glovebox Workstations (Mikrouna & Inert)
The multi-compartment glovebox systems with controlled N₂ environment (less than 1 ppm O² and moisture) house coating equipment such as spin coaters for the deposition of thin films via solution processing under inert atmospheric conditions. In addition, the Mikrouna system is integrated with an airconditioning unit for better climate control, which is critical for temperature sensitive processes. There are several auxiliary compartments, each dedicated to specific processes such as sample preparation, characterisation of samples and encapsulation of devices.
Glovebox-integrated Atomic Layer Deposition System (Kemicro)
This thermal evaporation system is used for the deposition of metals and inorganic and organic functional thin films, e.g. Ag, LiF and C60, onto various substrates (glass sheets, silicon wafers) of a wide range of sizes up to 166 mm x 166 mm. The desired film can be as thin as 15 nm with a non-uniformity of only ±5%. A very low base pressure is required in the vacuum chamber, which is achieved with a high-performance pump system that reaches < 5 x 10⁻⁵ Pa. The tool has the capability to provide either substrate heating (up to 300°C) or cooling (5-30°C) for film quality optimisation. The vacuum chamber is integrated into a glovebox, allowing the process (sample preparation and loading/ unloading) to be done in an inert N₂ environment (less than 1 ppm of O₂ and moisture).
Other equipment for processing and device integration:
- Slot die coater (WAD)
- I-V measurement and solar simulator (Enlitech)
- Connected twin-chambered perovskite evaporator (Technol)
- Thermal evaporation system (Angstrom)
- Low-damage low-temperature sputtering system
- Photoluminescence quantum yield tool (QYB)
- X-ray diffraction bench-top unit (Malvern P.)
- Semi-automated wafer bonding system (EVG)
- Chamber furnace (Protherm)
- UVO cleaner (Jelight)
- Fume hoods (Fisher Scientific)
- Humidity chamber for sample testing (Memmert)
- Inert encapsulation system