This 190-m2 class-100,000 cleanroom is dedicated to the fabrication and characterisation of perovskite solar cells, including advanced device integration such as perovskite mini-modules and perovskite-based tandem solar cells and mini-modules.
Glovebox Workstations (Mikrouna & Inert)
The multi-compartment glovebox systems with controlled N2 environment (less than 1 ppm O2 and moisture) house coating equipment such as spin coaters for the deposition of thin films via solution processing under inert atmospheric conditions. In addition, the Mikrouna system is integrated with an air-conditioning unit for better climate control, which is critical for temperature sensitive processes. There are several auxiliary compartments, each dedicated to specific processes such as sample preparation, characterisation of samples and encapsulation of devices.
Glovebox-integrated Atomic Layer Deposition System (Kemicro)
This atomic layer deposition system is used for the deposition of oxide-based functional thin films, e.g. tin oxide (SnO) onto various substrates (glass sheets, silicon wafers) of a wide range of sizes up to 230 mm ´ 230 mm. The desired film can be as thin as 15 nm with a non-uniformity of only ±3%. The depositions are carried out via sequential gas-phase chemical reaction of two precursor sources. The chamber is designed to enable a wide range of processing temperatures (80-150 ºC), depending on the material composition and quality of the desired film. To achieve high-quality films with low contamination levels, a very low base pressure is required in the vacuum chamber, which is achieved with a high-performance pump system that reaches < 10-2 Torr. The vacuum chamber is integrated into a glovebox, allowing the process (sample preparation and loading/unloading) to be done in an inert N2 environment (less than 1 ppm of O2 and moisture).
Other equipment for processing and device integration:
- Slot die coater (WAD)
- I-V measurement and solar simulator (Enlitech)
- Connected twin-chambered perovskite evaporator (Technol)
- Thermal evaporation system (Angstrom)
- Low-damage low-temperature sputtering system
- Photoluminescence quantum yield tool (QYB)
- X-ray diffraction bench-top unit (Malvern P.)
- Semi-automated wafer bonding system (EVG)
- Chamber furnace (Protherm)
- UVO cleaner (Jelight)
- Fume hoods (Fisher Scientific)
- Humidity chamber for sample testing (Memmert)
- Inert encapsulation system